Excimer Laser Gases
Custom gas mixtures for excimer laser technology used in semiconductor photolithography and other precision applications, blended for wavelength accuracy, stability, and dependable performance in demanding fab environments.
SpecGas Inc. supplies precision specialty gases for semiconductor fabs in Texas and Arizona, supporting photolithography, calibration, and high-purity process needs. From reactive blends to rare gases, every mixture is produced in-house for stability, consistency, and fast turnaround—helping fabs stay on spec in demanding production environments from Austin to Phoenix.

High-purity gas solutions tailored for semiconductor manufacturing, calibration, laser systems, and advanced process control.
Custom gas mixtures for excimer laser technology used in semiconductor photolithography and other precision applications, blended for wavelength accuracy, stability, and dependable performance in demanding fab environments.
Single and multi-component calibration gas mixtures for gas chromatography, moisture analyzers, FTIR analyzers, detectors, and monitoring systems, including reactive and non-reactive blends produced with proprietary in-house techniques.
Bespoke specialty gas blends built to customer specifications for purity, concentration, balance gas, and cylinder type, supporting semiconductor tools, research applications, and difficult-to-source process requirements.
High-purity pure gas cylinders supplied for manufacturing and laboratory use, with specifications matched to sensitive semiconductor and electronics applications where consistency and contamination control matter.
Rare gas blends including krypton, xenon, neon, and argon combinations for laser and advanced manufacturing applications, available in refillable and disposable cylinder options.
Specialized reactive calibration gases such as phosphine, chlorine, and hydrogen cyanide blends, prepared for stable low-level concentrations and reliable detector calibration in tightly controlled environments.
SpecGas Inc. helps semiconductor manufacturers source stable, high-purity specialty gases for critical tools and monitoring systems. With proprietary blending methods, in-house production, and NIST-traceable standards, we support demanding applications where consistency matters. For fabs across Texas and Arizona, that means responsive supply for photolithography, calibration, and process control needs without sacrificing accuracy or turnaround time.

Supporting exacting gas requirements for advanced manufacturing, labs, and semiconductor production teams.
Semiconductor teams rely on us for precision, responsiveness, and hard-to-source specialty gas expertise.
All mixtures are blended in-house for tighter quality control and more consistent results.
Rush service and industry-leading turnaround help Texas and Arizona fabs reduce supply delays.
Proprietary cylinder treatment supports stable reactive mixtures for demanding semiconductor monitoring applications.
NIST-traceable standards support reliable calibration programs across regulated Arizona and Texas production environments.
Experienced leadership focused on specialty gas precision.

President / Founder
Alfred Boehm founded SpecGas Inc. in 2001 after building a long career in specialty gases that began in Germany in 1976. He advanced into director-level roles at Messer Griesheims Industries and later moved to the United States in 1991 to continue research and development in specialty gas applications. His background includes deep work in reactive gas mixtures and internal cylinder treatment methods, knowledge that shaped SpecGas's proprietary blending approach. Alfred's technical leadership has helped the company become a trusted source for precise, stable, and difficult-to-produce gas mixtures used across research, calibration, and advanced industrial applications. His experience remains central to the company's quality standards and problem-solving capabilities.

Operations Manager
Marco Boehm oversees operations at SpecGas Inc., helping ensure customers receive responsive service, dependable delivery, and carefully managed production support. As part of the family leadership team, he plays an important role in translating the company's technical strengths into efficient day-to-day execution. Marco supports scheduling, coordination, and operational oversight for custom specialty gas orders, helping research labs, distributors, and industrial clients stay on timeline. His involvement reinforces the company's family-run approach, where attention to detail and customer responsiveness remain priorities. By combining operational discipline with SpecGas's established blending expertise, Marco helps maintain the consistency and service standards customers rely on for specialized gas mixtures and urgent project requirements.
SpecGas Inc. supplies semiconductor-focused specialty gases including excimer laser blends, high-purity pure gases, rare gas blends, custom calibration mixtures, and reactive gas mixtures. These products support photolithography, gas detection, analytical instruments, and process monitoring. We also provide custom blends built to exact concentration, balance gas, purity, and cylinder requirements for fab and electronics manufacturing environments.
Talk with our team about specs, cylinders, and turnaround.
Supporting semiconductor and advanced manufacturing customers with specialty gas supply across key Texas and Arizona markets.
Ask about support for your fab or facility.
Supports verified calibration accuracy and consistency.
Confidence for reactive gas mixture performance.
Controlled production for dependable gas quality.
Share your gas specifications, application, and cylinder needs. We’ll help you identify the right blend, confirm requirements, and discuss turnaround for your semiconductor operation.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.