Custom Gas Blends
Tailored specialty gas mixtures built to your exact composition, purity, and cylinder requirements for CVD, thin film deposition, and related process applications requiring stable, repeatable performance.
SpecGas Inc. supplies precision specialty gas blends tailored for CVD and thin film deposition applications, helping labs and manufacturers maintain process consistency, purity, and repeatable film performance. Backed by in-house blending, NIST-traceable standards, and deep reactive gas expertise, we support demanding semiconductor, electronics, laser, and advanced manufacturing environments.

High-purity specialty gas solutions for deposition, process development, and advanced manufacturing applications.
Tailored specialty gas mixtures built to your exact composition, purity, and cylinder requirements for CVD, thin film deposition, and related process applications requiring stable, repeatable performance.
High-purity gas cylinders supplied for manufacturing and laboratory environments where contamination control, consistent feedstock quality, and dependable supply are critical to deposition outcomes.
Precision rare gas mixtures including krypton, xenon, argon, and related blends for specialized deposition, laser, and electronics applications that demand exact ratios and stable delivery.
Difficult-to-produce reactive gas blends supported by proprietary cylinder treatment and blending methods designed to improve stability, shelf life, and consistency at low concentrations.
Custom gas mixtures for excimer laser technology used in photolithography, display manufacturing, and other precision processes closely tied to thin film and semiconductor production.
NIST-traceable calibration gas mixtures for analyzers, detectors, and monitoring equipment used to verify process conditions and maintain confidence in gas delivery systems.
For CVD and thin film deposition, gas quality directly affects film uniformity, repeatability, and process yield. SpecGas Inc. blends specialty gases in-house to customer specifications, supporting demanding applications with stable reactive mixtures, rare gas blends, and high-purity cylinders. Our proprietary techniques, NIST-traceable standards, and responsive turnaround help research teams and manufacturers maintain tighter process control from development through production.

Supporting advanced manufacturing and research teams with dependable specialty gas blending expertise.
Technical depth, responsive service, and precise blending for demanding gas applications.
All mixtures are blended in-house for tighter quality control and more consistent specifications.
Proprietary cylinder treatment supports stable reactive mixtures and longer shelf life in critical applications.
Industry-leading turnaround and rush service help keep research and production schedules moving.
NIST-traceable gas standards provide confidence in accuracy, verification, and repeatable process performance.
Experienced specialty gas leadership with hands-on technical oversight.

President / Founder
Alfred Boehm founded SpecGas Inc. in 2001 after building a long career in specialty gases that began in Germany in 1976. He advanced into director-level roles at Messer Griesheims Industries and later moved to the United States in 1991 to continue research and development in specialty gas applications. His background includes deep work in reactive gas mixtures and internal cylinder treatment methods, knowledge that shaped SpecGas's proprietary blending approach. Alfred's technical leadership has helped the company become a trusted source for precise, stable, and difficult-to-produce gas mixtures used across research, calibration, and advanced industrial applications. His experience remains central to the company's quality standards and problem-solving capabilities.

Operations Manager
Marco Boehm oversees operations at SpecGas Inc., helping ensure customers receive responsive service, dependable delivery, and carefully managed production support. As part of the family leadership team, he plays an important role in translating the company's technical strengths into efficient day-to-day execution. Marco supports scheduling, coordination, and operational oversight for custom specialty gas orders, helping research labs, distributors, and industrial clients stay on timeline. His involvement reinforces the company's family-run approach, where attention to detail and customer responsiveness remain priorities. By combining operational discipline with SpecGas's established blending expertise, Marco helps maintain the consistency and service standards customers rely on for specialized gas mixtures and urgent project requirements.
CVD, or chemical vapor deposition, is a process that forms a thin solid film on a substrate by introducing reactive gases into a controlled environment. The gases react or decompose at the surface to create the desired coating. Because film quality depends heavily on gas composition and purity, precise blending and stable delivery are essential for repeatable deposition results.
Talk with our team about blend specs and application requirements.
Recognized traceability for verified gas accuracy.
Longstanding specialty gas blending experience.
Controlled production for consistent quality.
Share your application, target composition, purity needs, and cylinder requirements. Our team will review your specifications and help identify the right specialty gas solution.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.