
Sulfur Hexafluoride (SF₆)
- NIST traceable, gravimetric blending
- Cylinders from 17L to 2000L capacity
- Custom SF₆ blends, fastest lead times
NIST Traceable Gas Standards
ISO 17025 Compliance
Sulfur Hexafluoride (SF₆) gas from SpecGas Inc. is a high-purity, NIST-traceable non-reactive specialty gas used for calibrating gas chromatography equipment, monitoring high-voltage electrical switchgear, semiconductor plasma etching, tracer gas studies, and greenhouse gas emissions tracking. Available in multiple cylinder sizes and types for industrial, utility, and laboratory applications.


Yes, sulfur hexafluoride (SF₆) gas is available for purchase from SpecGas Inc. in a range of cylinder sizes from 17 to 2,000 liters. Options include disposable steel or aluminum cylinders and refillable high-pressure cylinders. Custom blends and NIST-traceable calibration standards are available. Pricing is provided upon request, and rush service is offered when needed.
Talk to our experts for custom solutions and tailored guidance.

SF₆ used for GIS switchgear leak monitoring and utility emissions compliance per IEEE C37 and IEC 62271.

SF₆ serves as a process gas for plasma etch chemistry and semiconductor fabrication process monitoring.

Used for gas chromatography calibration, atmospheric tracer studies, and university lab analytical instrument calibration.

SF₆ calibration standards support greenhouse gas inventory reporting and HVAC air infiltration tracer studies.
Talk to our experts for custom solutions and tailored guidance.
All SF₆ mixtures are blended in-house, enabling faster turnaround and rush service when time-sensitive projects demand it.
Every SF₆ blend is produced using proprietary gravimetric techniques, ensuring accurate, repeatable results backed by NIST traceability.
From 17 to 2,000-liter cylinders in disposable or refillable formats, SpecGas tailors SF₆ solutions to exact customer specifications.
Submit your SF₆ specifications and a SpecGas expert will respond promptly with pricing, cylinder options, and lead time details.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.
For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.