NIST Traceable Gas Standards certified

NIST Traceable Gas Standards

ISO 17025 Accreditation certified

ISO 17025 Accreditation

Specialty Gas Mixtures for Various Applications

SpecGas Inc. offers a comprehensive range of specialty gas mixtures — including rare/noble gases, reactive calibration gases, hydrocarbons, VOCs, and atmospheric gases — custom blended to NIST traceable standards. Serving semiconductor, environmental monitoring, research, and industrial sectors, these precision blends support calibration, emissions testing, laser technology, and process control applications worldwide.

Nitric Oxide (NO) / NOx Calibration Gas Mixture
Phosphine Calibration Gas (PH₃)
Neon Gas (Ne)
Sulfur Hexafluoride (SF₆)
Oxygen (O₂)
Moisture Mixture Gas (Water Vapor Calibration Gas)
Hydrogen Sulfide (H₂S) Calibration Gas
Krypton Fluoride (KrF)
Chlorine (Cl₂)
Hydrogen Cyanide (HCN) Calibration Gas
VOCs Calibration Gas
Sulfur Dioxide (SO₂) Calibration Gas
Carbon Dioxide (CO₂)
Argon Gas (Ar)
Argon Fluoride (ArF)
Acetone Calibration Gas Mixture
Formaldehyde Calibration Gas
Ammonia (NH₃) Calibration Gas
Hydrocarbon Calibration Gas Mixtures
Krypton Chloride (KrCl)
Isobutylene (C₄H₈)
Hydrogen (H₂) Calibration Gas
Xenon Gas (Xe)
Hydrogen Chloride (HCl) Calibration Gas
Carbon Monoxide (CO) Calibration Gas
Propane (C₃H₈)
Methane (CH₄)
DMS (Dimethyl Sulfide)
Helium Gas (He)
Ethane (C₂H₆)
Nitrogen (N₂)
Chlorine Dioxide (ClO₂)

Our Range of Products

Nitric Oxide (NO) / NOx Calibration Gas Mixture

Nitric Oxide (NO) / NOx Calibration Gas Mixture

  • NIST Traceable NO/NOx blends at PPM and PPB levels
  • EPA Method 7E and Part 75 CEMS compliant calibration
  • Proprietary treatment ensures reactive gas stability
Phosphine Calibration Gas (PH₃)

Phosphine Calibration Gas (PH₃)

  • PH3 blends from 300 ppb to 5% total volume
  • NIST Traceable for semiconductor and fumigation monitoring
  • Nickel-plated and aluminum cylinders for reactive gas stability
Neon Gas (Ne)

Neon Gas (Ne)

  • NIST Traceable rare gas blends for precision
  • Custom blended to exact client specifications
  • Cylinders from 17L to larger refillable sizes
Sulfur Hexafluoride (SF₆)

Sulfur Hexafluoride (SF₆)

  • NIST Traceable SF6 blends with SpecGas Stability Guarantee
  • 17L to 2000L capacity in multiple cylinder types
  • Cost-effective cylinder deposit program available
Oxygen (O₂)

Oxygen (O₂)

  • High purity O2 blends for 4-gas monitor calibration
  • NIST Traceable, ISO 17025 compliant quality standards
  • 17L to 2000L in disposable and nickel-plated cylinders
Moisture Mixture Gas (Water Vapor Calibration Gas)

Moisture Mixture Gas (Water Vapor Calibration Gas)

  • Stable H2O vapor at 10, 100, 200 ppm standard concentrations
  • NIST Traceable moisture calibration gas mixture
  • Proprietary blending for extended shelf life stability

Showing 1 to 6 of 32 results

Frequently Asked Questions

What is an example of a specialty gas?

Examples of specialty gases include Neon (Ne) used in excimer laser mixtures and neon sign manufacturing, Formaldehyde calibration gas for EPA Method 320 stack emissions testing, Hydrogen Sulfide (H₂S) for confined space safety monitoring, and Krypton Fluoride (KrF) for semiconductor photolithography. These gases are distinguished by their high purity, precise concentrations, and application-specific formulations.

What are specialty gases?

What does NIST Traceable mean for calibration gases?

Can SpecGas blend custom multi-component specialty gas mixtures?

What cylinder types and sizes are available for specialty gas mixtures?

What industries use specialty gas mixtures?

How does SpecGas ensure the stability of reactive specialty gas mixtures?

Didn't find what you're looking for?

Talk to our experts for custom solutions and tailored guidance.

Industries We Serve

Semiconductor & Electronics Manufacturing

Semiconductor & Electronics Manufacturing

Excimer laser gas blends (ArF, KrF, KrCl) and high-purity noble gases support photolithography, CVD, sputtering, and display annealing processes.

Environmental & Emissions Monitoring

Environmental & Emissions Monitoring

NIST traceable calibration gases for CEMS, EPA Method stack testing, ambient air monitoring networks, and LDAR compliance programs.

Oil, Gas & Petrochemical

Oil, Gas & Petrochemical

Hydrocarbon LEL standards, BTU custody-transfer calibration gases, and reactive toxic blends for wellsite, pipeline, and refinery safety monitoring.

Research Laboratories & Universities

Research Laboratories & Universities

High-purity noble gases, reactive calibration standards, and custom multi-component blends for GC, FTIR, ICP, and analytical instrument calibration.

Didn't find what you're looking for?

Talk to our experts for custom solutions and tailored guidance.

You might also like

Why Research Labs & Industrial Facilities Choose SpecGas Inc.

Industry-Leading Lead Times

All gas mixtures are blended entirely in-house, enabling SpecGas to deliver faster than any competitor — with rush service available when urgency demands it.

Proprietary Blending & Stability Guarantee

Decades of specialty gas expertise and a proprietary cylinder treatment process ensure stable, accurate NIST traceable mixtures — even for the most reactive and difficult-to-blend gases.

Custom Mixtures for Any Application

From sub-PPB reactive toxics to multi-component excimer laser blends, SpecGas custom formulates specialty gases to exact client specifications across any concentration range or cylinder type.

Request a Custom Specialty Gas Quote Today

Submit your requirements and a SpecGas specialist will respond promptly with pricing, lead time, and mixture specifications tailored to your application.

Contact Us Today

For immediate assistance, feel free to give us a direct call at (215) 443-2600. You can also send us a quick email at website-inquiries@specgasinc.com.